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Bulk mode disk resonator with transverse piezoelectric actuation and electrostatic tuning

Elsayed, Mohannad Y. et Cicek, Paul-Vahe et Nabki, Frederic et El-Gamal, Mourad N.. 2016. « Bulk mode disk resonator with transverse piezoelectric actuation and electrostatic tuning ». Journal of Microelectromechanical Systems, vol. 25, nº 2. p. 252-261.

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Résumé

This paper presents a wine-glass bulk mode disk resonator based on a novel transverse piezoelectric actuation technique to achieve bulk mode resonance of the single crystalline silicon disk structure. The device is fabricated in a commercial microelectromechnical systems (MEMS) process, and combines reasonable quality factor and superior motional resistance in a low-cost technology. External capacitive electrodes are used for electrostatic tuning of the resonance frequency, relying on the electrostatic spring softening effect. The resonator was measured to have a resonance frequency of ~15 MHz and a quality factor of ~2000 in atmospheric pressure, increasing to ~5000 in 100-mtorr vacuum. The temperature co-efficient for the frequency of the device was also measured to be about -40 ppm/°C. The resonator requires no dc voltage for operation, but its resonance frequency can be tuned by varying the applied dc voltage on the capacitive electrodes with a factor of 1 ppb/V2.

Type de document: Article publié dans une revue, révisé par les pairs
Professeur:
Professeur
Nabki, Frédéric
Affiliation: Autres
Date de dépôt: 13 juill. 2016 17:42
Dernière modification: 06 déc. 2016 20:20
URI: http://espace2.etsmtl.ca/id/eprint/13196

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