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Measurement and analysis of structural damping in silicon carbide microresonators

Prabhakar, Sairam and Nabki, Frederic and Mourad, El-Gamal and Vengallatore, Srikar. 2009. « Measurement and analysis of structural damping in silicon carbide microresonators ». In Microelectromechanical Systems - Materials and Devices II (Boston, MA, USA, Dec. 1-2, 2008) Coll. « MRS Proceedings », vol. 1139. , pp. 47-52. Materials Research Society.
Compte des citations dans Scopus : 2.

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Item Type: Conference proceeding
Additional Information: 2008 MRS Fall Meeting
Professor:
Professor
Nabki, Frédéric
Affiliation: Autres
Date Deposited: 13 Jul 2016 18:05
Last Modified: 13 Jul 2016 18:05
URI: http://espace2.etsmtl.ca/id/eprint/13238

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