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Rotating circular micro-platform with integrated waveguides and latching arm for reconfigurable integrated optics

Briere, Jonathan et Elsayed, Mohannad et Saidani, Menouer et Bérard, Martin et Beaulieu, Philippe-Olivier et Rabbani-Haghighi, Hadi et Nabki, Frederic et Ménard, Michaël. 2017. « Rotating circular micro-platform with integrated waveguides and latching arm for reconfigurable integrated optics ». Micromachines, vol. 8, nº 12.

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Résumé

This work presents a laterally rotating micromachined platform integrated under optical waveguides to control the in-plane propagation direction of light within a die to select one of multiple outputs. The platform is designed to exhibit low constant optical losses throughout the motion range and is actuated electrostatically using an optimized circular comb drive. An angular motion of ±9.5° using 180 V is demonstrated. To minimize the optical losses between the moving and fixed parts, a gap-closing mechanism is implemented to reduce the initial air gap to submicron values. A latch structure is implemented to hold the platform in place with a resolution of 0.25° over the entire motion range. The platform was integrated with silicon nitride waveguides to create a crossbar switch and preliminary optical measurements are reported. In the bar state, the loss was measured to be 14.8 dB with the gap closed whereas in the cross state it was 12.2 dB. To the authors’ knowledge, this is the first optical switch based on a rotating microelectromechanical device with integrated silicon nitride waveguides reported to date.

Type de document: Article publié dans une revue, révisé par les pairs
Informations complémentaires: Identifiant de l'article: 354
Mots-clés libres: Fonds d'auteur ÉTS, FAETS
Professeur:
Professeur
Nabki, Frédéric
Affiliation: Génie électrique
Date de dépôt: 18 déc. 2017 17:23
Dernière modification: 12 janv. 2018 14:33
URI: http://espace2.etsmtl.ca/id/eprint/16038

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