A novel comb architecture for enhancing the sensitivity of bulk mode gyroscopes

Elsayed, Mohannad Y., Nabki, Frederic et El-Gamal, Mourad N.. 2013. « A novel comb architecture for enhancing the sensitivity of bulk mode gyroscopes ». Sensors, vol. 13, nº 12. pp. 16641-16656.
Compte des citations dans Scopus : 10.

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Résumé

This work introduces a novel architecture for increasing the sensitivity of bulk mode gyroscopes. It is based on adding parallel plate comb drives to the points of maximum vibration amplitude, and tuning the stiffness of the combs. This increases the drive strength and results in a significant sensitivity improvement. The architecture is targeted for technologies with ~100 nm transducer gaps in order to achieve very high performance devices. In this work, this sensitivity enhancement concept was implemented in SOIMUMPs, a commercial relatively large gap technology. Prototypes were measured to operate at frequencies of ~1.5 MHz, with quality factors of ~33,000, at a 10 mTorr vacuum level. Measurements using discrete electronics show a rate sensitivity of 0.31 μV/°/s, corresponding to a capacitance sensitivity of 0.43 aF/°/s/electrode, two orders of magnitude higher than a similar design without combs, fabricated in the same technology.

Type de document:	Article publié dans une revue, révisé par les pairs
Professeur:	Professeur Nabki, Frédéric
Affiliation:	Autres
Date de dépôt:	13 juill. 2016 17:42
Dernière modification:	16 oct. 2020 18:47
URI:	https://espace2.etsmtl.ca/id/eprint/13197

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