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application/pdfIEEEJournal of Microelectromechanical Systems;2022;31;4;10.1109/JMEMS.2022.3180299A High-Speed Chip-Scale Rotary Polygon Optical Scanner Based on a Micromotor Integrated With a Micro-Polyhedron MirrorVariable capacitance micromotorrotary polyhedron scannermicro-assemblyadhesive bondingchip-scale integrationAmit GourMichael MenardFrederic Nabki
Journal of Microelectromechanical Systems486 Aug. 2022410.1109/JMEMS.2022.318029931499
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