Arunachalam, Shivaram, Izquierdo, Ricardo et Nabki, Frederic.
2019.
« Low-hysteresis and fast response time humidity sensors using suspended functionalized carbon nanotubes ».
Sensors, vol. 19, nº 3.
Compte des citations dans Scopus : 33.
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Résumé
A humidity sensor using suspended carbon nanotubes (CNTs) was fabricated using a low-temperature surface micromachining process. The CNTs were functionalized with carboxylic acid groups that facilitated the interaction of water vapor with the CNTs. The humidity sensor showed a response time of 12 s and a recovery time of 47 s, along with superior hysteresis and stable performance. The hysteresis curve area of the suspended structure is 3.6, a 3.2-fold reduction in comparison to the non-suspended structure. A comparative study between suspended and non-suspended devices highlights the advantages of using a suspended architecture.
| Type de document: | Article publié dans une revue, révisé par les pairs |
|---|---|
| Professeur: | Professeur Izquierdo, Ricardo Nabki, Frédéric |
| Affiliation: | Génie électrique, Génie électrique |
| Date de dépôt: | 07 mars 2019 17:26 |
| Dernière modification: | 22 janv. 2020 20:10 |
| URI: | https://espace2.etsmtl.ca/id/eprint/18210 |
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