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Low-stress CMOS-compatible silicon carbide surface-micromachining technology-part I: process development and characterization

Nabki, Frederic, Dusatko, Tomas A., Vengallatore, Srikar et El-Gamal, Mourad N.. 2011. « Low-stress CMOS-compatible silicon carbide surface-micromachining technology-part I: process development and characterization ». Journal of Microelectromechanical Systems, vol. 20, nº 3. pp. 720-729.
Compte des citations dans Scopus : 20.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Nabki, Frédéric
Affiliation: Autres
Date Deposited: 13 Jul 2016 17:39
Last Modified: 13 Jul 2016 17:39
URI: https://espace2.etsmtl.ca/id/eprint/13200

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