Low-stress CMOS-compatible silicon carbide surface-micromachining technology-part I: process development and characterization

Nabki, Frederic, Dusatko, Tomas A., Vengallatore, Srikar and El-Gamal, Mourad N.. 2011. « Low-stress CMOS-compatible silicon carbide surface-micromachining technology-part I: process development and characterization ». Journal of Microelectromechanical Systems, vol. 20, nº 3. pp. 720-729.
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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Nabki, Frédéric
Affiliation:	Autres
Date Deposited:	13 Jul 2016 17:39
Last Modified:	13 Jul 2016 17:39
URI:	https://espace2.etsmtl.ca/id/eprint/13200

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