Nabki, Frederic, Dusatko, Tomas A., Vengallatore, Srikar et El-Gamal, Mourad N..
2011.
« Low-stress CMOS-compatible silicon carbide surface-micromachining technology-part I: process development and characterization ».
Journal of Microelectromechanical Systems, vol. 20, nº 3.
pp. 720-729.
Compte des citations dans Scopus : 20.
Rechercher dans Google Scholar
Official URL: http://dx.doi.org/10.1109/JMEMS.2011.2111355
Item Type: | Peer reviewed article published in a journal | ||
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Affiliation: | Autres | ||
Date Deposited: | 13 Jul 2016 17:39 | ||
Last Modified: | 13 Jul 2016 17:39 | ||
URI: | https://espace2.etsmtl.ca/id/eprint/13200 |
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