Surface-micromachined CMUT using low-temperature deposited silicon carbide membranes for above-IC integration

Zhang, Qing, Cicek, Paul-Vahe, Allidina, Karim, Nabki, Frederic and El-Gamal, Mourad N.. 2014. « Surface-micromachined CMUT using low-temperature deposited silicon carbide membranes for above-IC integration ». Journal of Microelectromechanical Systems, vol. 23, nº 2. pp. 482-493.
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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Nabki, Frédéric
Affiliation:	Autres
Date Deposited:	13 Jul 2016 17:40
Last Modified:	13 Jul 2016 17:40
URI:	https://espace2.etsmtl.ca/id/eprint/13204

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