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Surface-micromachined CMUT using low-temperature deposited silicon carbide membranes for above-IC integration

Zhang, Qing, Cicek, Paul-Vahe, Allidina, Karim, Nabki, Frederic et El-Gamal, Mourad N.. 2014. « Surface-micromachined CMUT using low-temperature deposited silicon carbide membranes for above-IC integration ». Journal of Microelectromechanical Systems, vol. 23, nº 2. pp. 482-493.
Compte des citations dans Scopus : 22.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Nabki, Frédéric
Affiliation: Autres
Date Deposited: 13 Jul 2016 17:40
Last Modified: 13 Jul 2016 17:40
URI: https://espace2.etsmtl.ca/id/eprint/13204

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