Zhang, Qing, Cicek, Paul-Vahe, Allidina, Karim, Nabki, Frederic et El-Gamal, Mourad N..
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« Surface-micromachined CMUT using low-temperature deposited silicon carbide membranes for above-IC integration ».
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Compte des citations dans Scopus : 22.
Rechercher dans Google Scholar
Official URL: http://dx.doi.org/10.1109/JMEMS.2013.2281304
| Item Type: | Peer reviewed article published in a journal | ||
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| Affiliation: | Autres | ||
| Date Deposited: | 13 Jul 2016 17:40 | ||
| Last Modified: | 13 Jul 2016 17:40 | ||
| URI: | https://espace2.etsmtl.ca/id/eprint/13204 |
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