Surface-micromachined CMUT using low-temperature deposited silicon carbide membranes for above-IC integration

Zhang, Qing, Cicek, Paul-Vahe, Allidina, Karim, Nabki, Frederic et El-Gamal, Mourad N.. 2014. « Surface-micromachined CMUT using low-temperature deposited silicon carbide membranes for above-IC integration ». Journal of Microelectromechanical Systems, vol. 23, nº 2. pp. 482-493.
Compte des citations dans Scopus : 22.

The full text of this document is not available here.

Item Type:	Peer reviewed article published in a journal
Professor:	Professor Nabki, Frédéric
Affiliation:	Autres
Date Deposited:	13 Jul 2016 17:40
Last Modified:	13 Jul 2016 17:40
URI:	https://espace2.etsmtl.ca/id/eprint/13204

Actions (login required)

View Item