Frequency tunable silicon carbide resonators for MEMS above IC

Nabki, Frederic, Dusatko, Tomas A. and El-Gamal, Mourad N.. 2008. « Frequency tunable silicon carbide resonators for MEMS above IC ». In IEEE 2008 Custom Integrated Circuits Conference (CICC) (San Jose, CA, USA, Sept. 21-24, 2008) pp. 185-188. Institute of Electrical and Electronics Engineers Inc..
Compte des citations dans Scopus : 6.

The full text of this document is not available here.

Item Type:	Conference proceeding
ISBN:	08865930
Professor:	Professor Nabki, Frédéric
Affiliation:	Autres
Date Deposited:	13 Jul 2016 18:03
Last Modified:	13 Jul 2016 18:03
URI:	https://espace2.etsmtl.ca/id/eprint/13233

Actions (login required)

View Item