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Frequency tunable silicon carbide resonators for MEMS above IC

Nabki, Frederic, Dusatko, Tomas A. et El-Gamal, Mourad N.. 2008. « Frequency tunable silicon carbide resonators for MEMS above IC ». In IEEE 2008 Custom Integrated Circuits Conference (CICC) (San Jose, CA, USA, Sept. 21-24, 2008), pp. 185-188. Institute of Electrical and Electronics Engineers Inc..
Compte des citations dans Scopus : 6.

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Item Type: Conference proceeding
Professor:
Professor
Nabki, Frédéric
Affiliation: Autres
Date Deposited: 13 Jul 2016 18:03
Last Modified: 13 Jul 2016 18:03
URI: https://espace2.etsmtl.ca/id/eprint/13233

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