El-Gamal, Mourad, Lemoine, Dominique, Cicek, Paul-Vahe et Nabki, Frederic (inventeurs) 2 April 2013. « Low temperature wafer level processing for MEMS devices ». The Royal Institution for the Advancement of Learning/McGill University (titulaire(s)). Brevet américain US 8,409,901.
The full text of this document is not available here.
Rechercher dans Google Scholar
Official URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PT...
Item Type: | Patents (Brevet américain) | ||
---|---|---|---|
Professor: |
|
||
Affiliation: | Autres | ||
Date Deposited: | 13 Jul 2016 18:24 | ||
Last Modified: | 13 Jul 2016 18:24 | ||
URI: | https://espace2.etsmtl.ca/id/eprint/13250 |
Actions (login required)
![]() |
View Item |