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Low temperature wafer level processing for MEMS devices

El-Gamal, Mourad, Lemoine, Dominique, Cicek, Paul-Vahe et Nabki, Frederic (inventeurs) 2 April 2013. « Low temperature wafer level processing for MEMS devices ». The Royal Institution for the Advancement of Learning/McGill University (titulaire(s)). Brevet américain US 8,409,901.

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Item Type: Patents (Brevet américain)
Professor:
Professor
Nabki, Frédéric
Affiliation: Autres
Date Deposited: 13 Jul 2016 18:24
Last Modified: 13 Jul 2016 18:24
URI: https://espace2.etsmtl.ca/id/eprint/13250

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