El-Gamal, Mourad, Lemoine, Dominique, Cicek, Paul-Vahe et Nabki, Frederic (inventeurs) 2 April 2013. « Low temperature wafer level processing for MEMS devices ». The Royal Institution for the Advancement of Learning/McGill University (titulaire(s)). Brevet américain US 8,409,901.
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Official URL: https://patentcenter.uspto.gov/applications/129222...
| Item Type: | Patents (Brevet américain) |
|---|---|
| Professor: | Professor Nabki, Frédéric |
| Affiliation: | Autres |
| Date Deposited: | 13 Jul 2016 18:24 |
| Last Modified: | 25 Nov 2022 00:37 |
| URI: | https://espace2.etsmtl.ca/id/eprint/13250 |
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