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Low temperature ceramic microelectromechanical structures

El-Gamal, Mourad, Nabki, Frederic et Cicek, Paul-Vahe (inventeurs) 25 February 2014. « Low temperature ceramic microelectromechanical structures ». The Royal Institution for the Advancement of Learning/McGill University (titulaire(s)). Brevet américain US 8,658,452.

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Item Type: Patents (Brevet américain)
Professor:
Professor
Nabki, Frédéric
Affiliation: Autres
Date Deposited: 13 Jul 2016 18:24
Last Modified: 13 Jul 2016 18:24
URI: https://espace2.etsmtl.ca/id/eprint/13251

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