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Low temperature ceramic microelectromechanical structures

Nabki, Frederic, El-Gamal, Mourad, Dusatko, Tomas A. et Vengallatore, Srikar (inventeurs) 6 December 2011. « Low temperature ceramic microelectromechanical structures ». The Royal Institution for the Advancement of Learning/McGill University (titulaire(s)). Brevet américain US 8,071,411.

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Item Type: Patents (Brevet américain)
Professor:
Professor
Nabki, Frédéric
Affiliation: Autres
Date Deposited: 13 Jul 2016 18:24
Last Modified: 13 Jul 2016 18:24
URI: https://espace2.etsmtl.ca/id/eprint/13254

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