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Micromachined resonators: A review

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Abdolvand, Reza, Bahreyni, Behraad, Lee, Joshua E. Y. et Nabki, Frédéric. 2016. « Micromachined resonators: A review ». Micromachines, vol. 7, nº 9.
Compte des citations dans Scopus : 68.

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Abstract

This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of their pervasive use across a wide variety of applications. This is partially due to the complexities associated with the physics that limit their performance, the intricacies involved in the processes that are used in their manufacturing, and the trade-offs in using different transduction mechanisms for their implementation. This work is intended to offer a brief introduction to all such details with references to the most influential contributions in the field for those interested in a deeper understanding of the material.

Item Type: Peer reviewed article published in a journal
Professor:
Professor
Nabki, Frédéric
Affiliation: Génie électrique
Date Deposited: 25 Oct 2016 20:45
Last Modified: 06 Dec 2016 18:23
URI: https://espace2.etsmtl.ca/id/eprint/13854

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