FRANÇAIS
A showcase of ÉTS researchers’ publications and other contributions
SEARCH

Low-temperature wafer level processing for MEMS devices

El-Gamal, Mourad, Lemoine, Dominique, Cicek, Paul-Vahe et Nabki, Frederic (inventeurs) 24 November 2015. « Low-temperature wafer level processing for MEMS devices ». The Royal Institution for the Advancement of Learning/McGill University (titulaire(s)). Brevet américain US 9,193,583.

The full text of this document is not available here.
Rechercher dans Google Scholar
Item Type: Patents (Brevet américain)
Professor:
Professor
Nabki, Frédéric
Affiliation: Autres
Date Deposited: 10 Nov 2016 21:16
Last Modified: 10 Nov 2016 21:16
URI: https://espace2.etsmtl.ca/id/eprint/13910

Actions (login required)

View Item View Item