El-Gamal, Mourad, Lemoine, Dominique, Cicek, Paul-Vahe and Nabki, Frederic (inventeurs) 24 November 2015. « Low-temperature wafer level processing for MEMS devices ». The Royal Institution for the Advancement of Learning/McGill University (titulaire(s)). Brevet américain US 9,193,583.
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Official URL: https://patentcenter.uspto.gov/applications/136612...
| Item Type: | Patents (Brevet américain) |
|---|---|
| Professor: | Professor Nabki, Frédéric |
| Affiliation: | Autres |
| Date Deposited: | 10 Nov 2016 21:16 |
| Last Modified: | 24 Nov 2022 23:53 |
| URI: | https://espace2.etsmtl.ca/id/eprint/13910 |
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