MEMS fabrication on LTCC substrates for RF applications : challenges and perspectives

Bahloul, Dorra, Amar, Achraf Ben and Kouki, Ammar B.. 2016. « MEMS fabrication on LTCC substrates for RF applications : challenges and perspectives ». In 12th International conference and exhibition on ceramic interconnect and ceramic microsystems technologies (CICMT) (Denver, CO, USA, Apr. 19-21, 2016) pp. 89-94. International Microelectronics and Packaging Society (IMAPS).

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Item Type:	Conference proceeding
Professor:	Professor Kouki, Ammar B.
Affiliation:	Génie électrique
Date Deposited:	02 Dec 2016 19:12
Last Modified:	02 Dec 2016 19:12
URI:	https://espace2.etsmtl.ca/id/eprint/14071

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