18-MHZ Silicon lame mode resonators with corner and central anchor architectures in a dual-wafer SOI technology

Elsayed, Mohannad Y. et Nabki, Frederic. 2017. « 18-MHZ Silicon lame mode resonators with corner and central anchor architectures in a dual-wafer SOI technology ». Journal of Microelectromechanical Systems, vol. 26, nº 1. pp. 67-74.
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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Nabki, Frédéric
Affiliation:	Génie électrique
Date Deposited:	20 Apr 2017 17:42
Last Modified:	22 Jan 2020 20:10
URI:	https://espace2.etsmtl.ca/id/eprint/15098

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