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18-MHZ Silicon lame mode resonators with corner and central anchor architectures in a dual-wafer SOI technology

Elsayed, Mohannad Y. et Nabki, Frederic. 2017. « 18-MHZ Silicon lame mode resonators with corner and central anchor architectures in a dual-wafer SOI technology ». Journal of Microelectromechanical Systems, vol. 26, nº 1. pp. 67-74.
Compte des citations dans Scopus : 4.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Nabki, Frédéric
Affiliation: Génie électrique
Date Deposited: 20 Apr 2017 17:42
Last Modified: 22 Jan 2020 20:10
URI: https://espace2.etsmtl.ca/id/eprint/15098

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