Elsayed, Mohannad Y. et Nabki, Frederic.
2017.
« 18-MHZ Silicon lame mode resonators with corner and central anchor architectures in a dual-wafer SOI technology ».
Journal of Microelectromechanical Systems, vol. 26, nº 1.
pp. 67-74.
Compte des citations dans Scopus : 4.
Rechercher dans Google Scholar
Official URL: http://dx.doi.org/10.1109/jmems.2016.2607118
Item Type: | Peer reviewed article published in a journal | ||
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Affiliation: | Génie électrique | ||
Date Deposited: | 20 Apr 2017 17:42 | ||
Last Modified: | 22 Jan 2020 20:10 | ||
URI: | https://espace2.etsmtl.ca/id/eprint/15098 |
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