A novel multi-level IC-compatible surface microfabrication technology for MEMS with independently controlled lateral and vertical submicron transduction gaps

Cicek, Paul-Vahe, Elsayed, Mohannad, Nabki, Frederic and El-Gamal, Mourad. 2017. « A novel multi-level IC-compatible surface microfabrication technology for MEMS with independently controlled lateral and vertical submicron transduction gaps ». Journal of Micromechanics and Microengineering, vol. 27, nº 11.
Compte des citations dans Scopus : 3.

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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Nabki, Frédéric
Affiliation:	Génie électrique
Date Deposited:	28 Nov 2017 16:17
Last Modified:	22 Jan 2020 20:10
URI:	https://espace2.etsmtl.ca/id/eprint/15986

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