FRANÇAIS
A showcase of ÉTS researchers’ publications and other contributions
SEARCH

A novel multi-level IC-compatible surface microfabrication technology for MEMS with independently controlled lateral and vertical submicron transduction gaps

Cicek, Paul-Vahe, Elsayed, Mohannad, Nabki, Frederic et El-Gamal, Mourad. 2017. « A novel multi-level IC-compatible surface microfabrication technology for MEMS with independently controlled lateral and vertical submicron transduction gaps ». Journal of Micromechanics and Microengineering, vol. 27, nº 11.
Compte des citations dans Scopus : 3.

The full text of this document is not available here.
Rechercher dans Google Scholar
Item Type: Peer reviewed article published in a journal
Professor:
Professor
Nabki, Frédéric
Affiliation: Génie électrique
Date Deposited: 28 Nov 2017 16:17
Last Modified: 22 Jan 2020 20:10
URI: https://espace2.etsmtl.ca/id/eprint/15986

Actions (login required)

View Item View Item