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Rotating circular micro-platform with integrated waveguides and latching arm for reconfigurable integrated optics

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Briere, Jonathan, Elsayed, Mohannad, Saidani, Menouer, Bérard, Martin, Beaulieu, Philippe-Olivier, Rabbani-Haghighi, Hadi, Nabki, Frederic et Ménard, Michaël. 2017. « Rotating circular micro-platform with integrated waveguides and latching arm for reconfigurable integrated optics ». Micromachines, vol. 8, nº 12.
Compte des citations dans Scopus : 4.

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Abstract

This work presents a laterally rotating micromachined platform integrated under optical waveguides to control the in-plane propagation direction of light within a die to select one of multiple outputs. The platform is designed to exhibit low constant optical losses throughout the motion range and is actuated electrostatically using an optimized circular comb drive. An angular motion of ±9.5° using 180 V is demonstrated. To minimize the optical losses between the moving and fixed parts, a gap-closing mechanism is implemented to reduce the initial air gap to submicron values. A latch structure is implemented to hold the platform in place with a resolution of 0.25° over the entire motion range. The platform was integrated with silicon nitride waveguides to create a crossbar switch and preliminary optical measurements are reported. In the bar state, the loss was measured to be 14.8 dB with the gap closed whereas in the cross state it was 12.2 dB. To the authors’ knowledge, this is the first optical switch based on a rotating microelectromechanical device with integrated silicon nitride waveguides reported to date.

Item Type: Peer reviewed article published in a journal
Additional Information: Identifiant de l'article: 354
Uncontrolled Keywords: Fonds d'auteur ÉTS, FAETS
Professor:
Professor
Nabki, Frédéric
Affiliation: Génie électrique
Date Deposited: 18 Dec 2017 17:23
Last Modified: 22 Jan 2020 20:10
URI: https://espace2.etsmtl.ca/id/eprint/16038

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