Arunachalam, Shivaram, Izquierdo, Ricardo et Nabki, Frederic.
2019.
« Low-hysteresis and fast response time humidity sensors using suspended functionalized carbon nanotubes ».
Sensors, vol. 19, nº 3.
Compte des citations dans Scopus : 6.
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Nabki F 2019 18210.pdf - Published Version Use licence: Creative Commons CC BY. Download (4MB) | Preview |
Abstract
A humidity sensor using suspended carbon nanotubes (CNTs) was fabricated using a low-temperature surface micromachining process. The CNTs were functionalized with carboxylic acid groups that facilitated the interaction of water vapor with the CNTs. The humidity sensor showed a response time of 12 s and a recovery time of 47 s, along with superior hysteresis and stable performance. The hysteresis curve area of the suspended structure is 3.6, a 3.2-fold reduction in comparison to the non-suspended structure. A comparative study between suspended and non-suspended devices highlights the advantages of using a suspended architecture.
Item Type: | Peer reviewed article published in a journal | |||
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Affiliation: | Génie électrique, Génie électrique | |||
Date Deposited: | 07 Mar 2019 17:26 | |||
Last Modified: | 22 Jan 2020 20:10 | |||
URI: | https://espace2.etsmtl.ca/id/eprint/18210 |
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