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Low-hysteresis and fast response time humidity sensors using suspended functionalized carbon nanotubes

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Arunachalam, Shivaram, Izquierdo, Ricardo et Nabki, Frederic. 2019. « Low-hysteresis and fast response time humidity sensors using suspended functionalized carbon nanotubes ». Sensors, vol. 19, nº 3.
Compte des citations dans Scopus : 5.

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Abstract

A humidity sensor using suspended carbon nanotubes (CNTs) was fabricated using a low-temperature surface micromachining process. The CNTs were functionalized with carboxylic acid groups that facilitated the interaction of water vapor with the CNTs. The humidity sensor showed a response time of 12 s and a recovery time of 47 s, along with superior hysteresis and stable performance. The hysteresis curve area of the suspended structure is 3.6, a 3.2-fold reduction in comparison to the non-suspended structure. A comparative study between suspended and non-suspended devices highlights the advantages of using a suspended architecture.

Item Type: Peer reviewed article published in a journal
Professor:
Professor
Izquierdo, Ricardo
Nabki, Frédéric
Affiliation: Génie électrique, Génie électrique
Date Deposited: 07 Mar 2019 17:26
Last Modified: 22 Jan 2020 20:10
URI: https://espace2.etsmtl.ca/id/eprint/18210

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