Low-friction, high-speed rotary 3-phase micromotor using the PolyMUMPS process

Gour, Amit, Ménard, Michaël et Nabki, Frederic. 2020. « Low-friction, high-speed rotary 3-phase micromotor using the PolyMUMPS process ». Journal of Microelectromechanical Systems, vol. 29, nº 4. pp. 532-543.

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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Nabki, Frédéric
Affiliation:	Génie électrique
Date Deposited:	12 Nov 2020 21:43
Last Modified:	12 Nov 2020 21:43
URI:	https://espace2.etsmtl.ca/id/eprint/21395

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