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A rapid technique to integrate micro-components on released MEMS dies using SU-8

Gour, Amit, Nabki, Frédéric et Ménard, Michaël. 2020. « A rapid technique to integrate micro-components on released MEMS dies using SU-8 ». Journal of Micromechanics and Microengineering, vol. 30, nº 11.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Nabki, Frédéric
Affiliation: Génie électrique
Date Deposited: 12 Nov 2020 21:43
Last Modified: 12 Nov 2020 21:43
URI: https://espace2.etsmtl.ca/id/eprint/21396

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