Gour, Amit, Nabki, Frédéric et Ménard, Michaël.
2020.
« A rapid technique to integrate micro-components on released MEMS dies using SU-8 ».
Journal of Micromechanics and Microengineering, vol. 30, nº 11.
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Official URL: http://dx.doi.org/10.1088/1361-6439/abb52e
Item Type: | Peer reviewed article published in a journal | ||
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Affiliation: | Génie électrique | ||
Date Deposited: | 12 Nov 2020 21:43 | ||
Last Modified: | 12 Nov 2020 21:43 | ||
URI: | https://espace2.etsmtl.ca/id/eprint/21396 |
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