A rapid technique to integrate micro-components on released MEMS dies using SU-8

Gour, Amit, Nabki, Frédéric et Ménard, Michaël. 2020. « A rapid technique to integrate micro-components on released MEMS dies using SU-8 ». Journal of Micromechanics and Microengineering, vol. 30, nº 11.

The full text of this document is not available here.

Item Type:	Peer reviewed article published in a journal
Professor:	Professor Nabki, Frédéric
Affiliation:	Génie électrique
Date Deposited:	12 Nov 2020 21:43
Last Modified:	12 Nov 2020 21:43
URI:	https://espace2.etsmtl.ca/id/eprint/21396

Actions (login required)

View Item