A rapid technique to integrate micro-components on released MEMS dies using SU-8

Gour, Amit, Nabki, Frédéric and Ménard, Michaël. 2020. « A rapid technique to integrate micro-components on released MEMS dies using SU-8 ». Journal of Micromechanics and Microengineering, vol. 30, nº 11.

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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Nabki, Frédéric Ménard, Michaël
Affiliation:	Génie électrique, Autres
Date Deposited:	12 Nov 2020 21:43
Last Modified:	16 Aug 2023 16:21
URI:	https://espace2.etsmtl.ca/id/eprint/21396

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