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High torque electrostatic micromotor fabricated using polymumps for optical scanning applications

Gour, Amit, Ménard, Michaël et Nabki, Frederic. 2021. « High torque electrostatic micromotor fabricated using polymumps for optical scanning applications ». In 34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (Gainesville, FL, USA, Jan. 25-29, 2021) pp. 716-719. Institute of Electrical and Electronics Engineers Inc..

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Item Type: Conference proceeding
ISBN: 10846999
Professor:
Professor
Nabki, Frédéric
Affiliation: Génie électrique
Date Deposited: 30 Apr 2021 18:34
Last Modified: 30 Apr 2021 18:34
URI: https://espace2.etsmtl.ca/id/eprint/22531

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