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Simultaneous measurements of the fabricated width and thickness of silicon nitride waveguides with microring resonators

Jalali Azizpour, Mohammadreza, Phan, Duy-Thach, Tareki, Abubaker, Le Drogoff, Boris, Chaker, Mohamed and Menard, Michaël. 2021. « Simultaneous measurements of the fabricated width and thickness of silicon nitride waveguides with microring resonators ». In IEEE International Conference on Group IV Photonics (GFP) (Malaga, Spain, Dec. 07-10, 2021) IEEE Computer Society.

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Item Type: Conference proceeding
Professor:
Professor
Ménard, Michaël
Affiliation: Autres
Date Deposited: 16 Nov 2022 21:00
Last Modified: 08 Aug 2023 18:53
URI: https://espace2.etsmtl.ca/id/eprint/25825

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