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2D electrothermal MEMS waveguide positioner

Rabih, Almur A. S., Sharma, Suraj, Menard, Michaël and Nabki, Frederic. 2022. « 2D electrothermal MEMS waveguide positioner ». In IEEE Photonics Conference (IPC) (Vancouver, BC, Canada, Nov. 13-17, 2022) Institute of Electrical and Electronics Engineers Inc..

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Item Type: Conference proceeding
Professor:
Professor
Ménard, Michaël
Nabki, Frédéric
Affiliation: Génie électrique, Génie électrique
Date Deposited: 26 Jan 2023 21:38
Last Modified: 26 Jan 2023 21:38
URI: https://espace2.etsmtl.ca/id/eprint/26104

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