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Holes effects on RF MEMS parallel membranes capacitors

Bendali, A., Labedan, R., Domingue, F. and Nerguizian, Vahé. 2006. « Holes effects on RF MEMS parallel membranes capacitors ». In Canadian Conference on Electrical and Computer Engineering (CCECE) (Ottawa, Canada, May 7-10, 2006) pp. 2140-2143. Piscataway, NJ, USA : Institute of Electrical and Electronics Engineers.
Compte des citations dans Scopus : 14.

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Item Type: Conference proceeding
ISBN: 1-4244-0038-4
Professor:
Professor
Nerguizian, Vahé
Affiliation: Génie électrique
Date Deposited: 30 Oct 2012 18:17
Last Modified: 20 Aug 2015 14:34
URI: https://espace2.etsmtl.ca/id/eprint/2664

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