FRANÇAIS
A showcase of ÉTS researchers’ publications and other contributions
SEARCH

High aspect ratio sapphire micromachining by ultraviolet laser-induced plasma-assisted ablation (LIPAA)

Downloads

Downloads per month over past year

Cole, Douglas F., Zednik, Ricardo J. and Hof, Lucas A.. 2023. « High aspect ratio sapphire micromachining by ultraviolet laser-induced plasma-assisted ablation (LIPAA) ». International Journal of Applied Ceramic Technology, vol. 20, nº 5. pp. 3279-3286.

[thumbnail of Zednik-R-2023-26766.pdf]
Preview
PDF
Zednik-R-2023-26766.pdf - Published Version
Use licence: Creative Commons CC BY-NC-ND.

Download (2MB) | Preview

Abstract

The ultraviolet laser-induced plasma-assisted ablation performed in this article can attain deep and high-quality engravings in sapphire without necessitating volatile solutions or expensive equipment such as high-power ultrashort-pulsed lasers. The dominant mechanism of ablation is discovered to be from the direct ablation of excited sapphire surfaces and not from the plasma generated from the target material. Only an initial deposition fromthe target is needed to initiate the direct ablation.Note that 20-μmwide, 30-μmdeep channel and hole features with a surface roughness (Sa) of .65 μm are achieved at an etching rate of .3 μm per pulse without the need for extensive cleaning. Engravings can reach up to 150-μm depths at a maximum tapering angle of 5◦ until the shrinking absorbent surface vanishes, and 500-μm wide 430-μm deep topside through-cutting is achieved. This study characterizes the morphology of direct laser ablation of transient absorbent sapphire surfaces. This method demonstrates the potential for the low-cost rapid engraving of high aspect ratio features in transparent sapphire substrates.

Item Type: Peer reviewed article published in a journal
Professor:
Professor
Zednik, Ricardo
Hof, Lucas
Affiliation: Génie mécanique, Génie mécanique
Date Deposited: 28 Jun 2023 18:52
Last Modified: 23 Nov 2023 15:15
URI: https://espace2.etsmtl.ca/id/eprint/26766

Actions (login required)

View Item View Item