Kolahdouz-Moghaddam, Amir-Reza, Nabavi, Seyedfakhreddin and Nabki, Frederic.
2023.
« Temperature dependence modeling and thermal sensitivity reduction of bulk micromachined silicon MEMS lame resonators ».
Journal of Microelectromechanical Systems, vol. 32, nº 4.
pp. 314-326.
Compte des citations dans Scopus : 6.
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Official URL: https://doi.org/10.1109/JMEMS.2023.3281159
| Item Type: | Peer reviewed article published in a journal |
|---|---|
| Professor: | Professor Nabki, Frédéric |
| Affiliation: | Génie électrique |
| Date Deposited: | 12 Jul 2023 18:39 |
| Last Modified: | 13 Sep 2023 14:47 |
| URI: | https://espace2.etsmtl.ca/id/eprint/27006 |
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