Design and experimental validation of a piezoelectric resonant MEMS phase comparator

Gratuze, Mathieu and Nabki, Frédéric. 2022. « Design and experimental validation of a piezoelectric resonant MEMS phase comparator ». In Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head Island, SC, USA, June 05-09, 2022) pp. 278-279. Transducer Research Foundation.

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Item Type:	Conference proceeding
Professor:	Professor Nabki, Frédéric
Affiliation:	Génie électrique
Date Deposited:	16 Oct 2023 17:32
Last Modified:	16 Oct 2023 17:32
URI:	https://espace2.etsmtl.ca/id/eprint/27903

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