Two-axis MEMS positioner for waveguide alignment in silicon nitride photonic integrated circuits

Rabih, Almur A. S., Sharma, Suraj, Pita, Julian, Ménard, Michaël and Nabki, Frederic. 2023. « Two-axis MEMS positioner for waveguide alignment in silicon nitride photonic integrated circuits ». Optics Express, vol. 31, nº 19. pp. 30797-30814.
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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Ménard, Michaël Nabki, Frédéric
Affiliation:	Génie électrique, Génie électrique
Date Deposited:	16 Nov 2023 15:52
Last Modified:	16 Nov 2023 15:52
URI:	https://espace2.etsmtl.ca/id/eprint/28019

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