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Two-axis MEMS positioner for waveguide alignment in silicon nitride photonic integrated circuits

Rabih, Almur A. S., Sharma, Suraj, Pita, Julian, Ménard, Michaël and Nabki, Frederic. 2023. « Two-axis MEMS positioner for waveguide alignment in silicon nitride photonic integrated circuits ». Optics Express, vol. 31, nº 19. pp. 30797-30814.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Ménard, Michaël
Nabki, Frédéric
Affiliation: Génie électrique, Génie électrique
Date Deposited: 16 Nov 2023 15:52
Last Modified: 16 Nov 2023 15:52
URI: https://espace2.etsmtl.ca/id/eprint/28019

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