Hybrid MEMS Actuator With 3 degrees-of-freedom for efficient planar optical switching

Sharma, Suraj, Nabavi, Seyedfakhreddin, Rabih, Almur Abdelkreem Saeed, Ménard, Michaël and Nabki, Frederic. 2023. « Hybrid MEMS Actuator With 3 degrees-of-freedom for efficient planar optical switching ». Journal of Microelectromechanical Systems, vol. 32, nº 6. pp. 593-603.
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Official URL: https://doi.org/10.1109/JMEMS.2023.3322223

Item Type:	Peer reviewed article published in a journal
Professor:	Professor Ménard, Michaël Nabki, Frédéric
Affiliation:	Génie électrique, Génie électrique
Date Deposited:	16 Nov 2023 15:52
Last Modified:	19 Jan 2024 14:04
URI:	https://espace2.etsmtl.ca/id/eprint/28021

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