Kazemi, Mohammad, Nabavi, Seyedfakhreddin, Gratuze, Mathieu and Nabki, Frederic.
2024.
« Frequency selection in a MEMS flexural beam resonator by electrostatic actuation ».
Journal of Microelectromechanical Systems, vol. 33, nº 1.
pp. 66-77.
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Official URL: https://doi.org/10.1109/JMEMS.2023.3331701
| Item Type: | Peer reviewed article published in a journal |
|---|---|
| Professor: | Professor Nabki, Frédéric |
| Affiliation: | Génie électrique |
| Date Deposited: | 18 Dec 2023 19:04 |
| Last Modified: | 12 Mar 2024 18:30 |
| URI: | https://espace2.etsmtl.ca/id/eprint/28172 |
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