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Frequency selection in a MEMS flexural beam resonator by electrostatic actuation

Kazemi, Mohammad, Nabavi, Seyedfakhreddin, Gratuze, Mathieu and Nabki, Frederic. 2023. « Frequency selection in a MEMS flexural beam resonator by electrostatic actuation ». Journal of Microelectromechanical Systems.
(In press)

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Nabki, Frédéric
Affiliation: Génie électrique
Date Deposited: 18 Dec 2023 19:04
Last Modified: 18 Dec 2023 19:04
URI: https://espace2.etsmtl.ca/id/eprint/28172

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