Rabih, Almur A. S., Nabavi, Seyedfakhreddin, Ménard, Michaël and Nabki, Frederic.
2024.
« Multi degrees-of-freedom hybrid piezoelectric-electrostatic MEMS actuators integrated with displacement sensors ».
Journal of Microelectromechanical Systems, vol. 33, nº 1.
pp. 21-36.
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Official URL: https://doi.org/10.1109/JMEMS.2023.3341039
| Item Type: | Peer reviewed article published in a journal |
|---|---|
| Professor: | Professor Ménard, Michaël Nabki, Frédéric |
| Affiliation: | Génie électrique, Génie électrique |
| Date Deposited: | 19 Jan 2024 14:18 |
| Last Modified: | 12 Mar 2024 18:25 |
| URI: | https://espace2.etsmtl.ca/id/eprint/28285 |
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