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Multi degrees-of-freedom hybrid piezoelectric-electrostatic MEMS actuators integrated with displacement sensors

Rabih, Almur A. S., Nabavi, Seyedfakhreddin, Ménard, Michaël and Nabki, Frederic. 2023. « Multi degrees-of-freedom hybrid piezoelectric-electrostatic MEMS actuators integrated with displacement sensors ». Journal of Microelectromechanical Systems.
(In press)

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Ménard, Michaël
Nabki, Frédéric
Affiliation: Génie électrique, Génie électrique
Date Deposited: 19 Jan 2024 14:18
Last Modified: 19 Jan 2024 14:18
URI: https://espace2.etsmtl.ca/id/eprint/28285

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