Optical detection of angular acceleration rate for MEMS based gyroscopes

Nerguizian, Vahé, Qobadian-Kalhor, Ali, Packirisamy, Muthukumaran and Stiharu, Ion. 2004. « Optical detection of angular acceleration rate for MEMS based gyroscopes ». In International Conference on Applications of Photonics Technology (Ottawa, Canada, Sept. 27, 2004) Coll. « Proceedings of SPIE », vol. 5577. pp. 621-627. USA : SPIE.

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Item Type:	Conference proceeding
ISBN:	0-8194-5526-1
Editors:	Editors ORCID Armitage, J. C. UNSPECIFIED Fafard, S. UNSPECIFIED Lessard, R. A. UNSPECIFIED Lampropoulos, G. A. UNSPECIFIED
Professor:	Professor Nerguizian, Vahé
Affiliation:	Génie électrique
Date Deposited:	18 Apr 2013 19:01
Last Modified:	18 Apr 2013 19:01
URI:	https://espace2.etsmtl.ca/id/eprint/4055

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