Infrastructure for the design and fabrication of MEMS for RF/microwave and millimeter wave applications

Nerguizian, Vahé and Rafaf, Mustapha. 2004. « Infrastructure for the design and fabrication of MEMS for RF/microwave and millimeter wave applications ». In Mems, Moems, and Micromachining (Strasbourg, France, Apr. 29-30, 2004) Coll. « Proceedings of SPIE », vol. 5455. pp. 202-211. USA : SPIE.

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Item Type:	Conference proceeding
ISBN:	0-8194-5378-1
Editors:	Editors ORCID Urey, H. UNSPECIFIED ElFatatry, A. UNSPECIFIED
Professor:	Professor Nerguizian, Vahé
Affiliation:	Génie électrique
Date Deposited:	18 Apr 2013 19:01
Last Modified:	18 Apr 2013 19:01
URI:	https://espace2.etsmtl.ca/id/eprint/4056

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