Modeling of electrostatically actuated cylindrical-waveguide-based optical microsystem

Pendyala, Srinivasa R., Packirisamy, Muthukumaran, Stiharu, Ion, Sivakumar, Narayanswamy and Nerguizian, Vahé. 2005. « Modeling of electrostatically actuated cylindrical-waveguide-based optical microsystem ». In MOEMS and Miniaturized Systems V (San Jose, CA, USA, Jan. 25-26, 2005) Coll. « Proceedings of SPIE », vol. 5719. pp. 30-37. USA : SPIE.
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Item Type:	Conference proceeding
Professor:	Professor Nerguizian, Vahé
Affiliation:	Génie électrique
Date Deposited:	24 Jul 2013 20:42
Last Modified:	24 Jul 2013 20:42
URI:	https://espace2.etsmtl.ca/id/eprint/4960

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