Micro-optical thermally actuated platform in MUMPS technology

Li, Huijun, Stiharu, Ion, Packirisamy, Muthukumaran and Nerguizian, Vahé. 2005. « Micro-optical thermally actuated platform in MUMPS technology ». In 4th WSEAS International Conference on Electronics, Signal Processing and Control (ESPOCO) (Rio de Janeiro, Brazil, Apr. 25-27, 2005)
Compte des citations dans Scopus : 2.

The full text of this document is not available here.

Item Type:	Conference proceeding
Professor:	Professor Nerguizian, Vahé
Affiliation:	Génie électrique
Date Deposited:	24 Jul 2013 20:44
Last Modified:	20 Aug 2015 15:45
URI:	https://espace2.etsmtl.ca/id/eprint/5421

Actions (login required)

View Item