A novel prototyping method for die-level monolithic integration of MEMS above-IC

Cicek, Paul-Vahe, Zhang, Qing, Saha, Tanmoy, Mahdavi, Sareh, Allidina, Karim, Nabki, Frederic et El-Gamal, Mourad. 2013. « A novel prototyping method for die-level monolithic integration of MEMS above-IC ». Journal of Micromechanics and Microengineering, vol. 23, nº 6. 065013.
Compte des citations dans Scopus : 5.

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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Nabki, Frédéric
Affiliation:	Autres
Date Deposited:	13 Jul 2016 17:41
Last Modified:	13 Jul 2016 17:41
URI:	https://espace2.etsmtl.ca/id/eprint/13192

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