Cicek, Paul-Vahe, Zhang, Qing, Saha, Tanmoy, Mahdavi, Sareh, Allidina, Karim, Nabki, Frederic et El-Gamal, Mourad.
2013.
« A novel prototyping method for die-level monolithic integration of MEMS above-IC ».
Journal of Micromechanics and Microengineering, vol. 23, nº 6.
065013.
Compte des citations dans Scopus : 5.
Rechercher dans Google Scholar
Official URL: http://dx.doi.org/10.1088/0960-1317/23/6/065013
Item Type: | Peer reviewed article published in a journal | ||
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Affiliation: | Autres | ||
Date Deposited: | 13 Jul 2016 17:41 | ||
Last Modified: | 13 Jul 2016 17:41 | ||
URI: | https://espace2.etsmtl.ca/id/eprint/13192 |
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