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A novel prototyping method for die-level monolithic integration of MEMS above-IC

Cicek, Paul-Vahe, Zhang, Qing, Saha, Tanmoy, Mahdavi, Sareh, Allidina, Karim, Nabki, Frederic et El-Gamal, Mourad. 2013. « A novel prototyping method for die-level monolithic integration of MEMS above-IC ». Journal of Micromechanics and Microengineering, vol. 23, nº 6. 065013.
Compte des citations dans Scopus : 5.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Nabki, Frédéric
Affiliation: Autres
Date Deposited: 13 Jul 2016 17:41
Last Modified: 13 Jul 2016 17:41
URI: https://espace2.etsmtl.ca/id/eprint/13192

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