Elsayed, Mohannad Y., Beaulieu, Philippe-Olivier, Briere, Jonathan, Menard, Michael and Nabki, Frederic.
2016.
« A novel technique for die-level post-processing of released optical MEMS ».
Journal of Micromechanics and Microengineering, vol. 26, nº 5.
Compte des citations dans Scopus : 2.
Rechercher dans Google Scholar
Official URL: http://dx.doi.org/10.1088/0960-1317/26/5/057001
| Item Type: | Peer reviewed article published in a journal |
|---|---|
| Professor: | Professor Ménard, Michaël Nabki, Frédéric |
| Affiliation: | Autres, Autres |
| Date Deposited: | 13 Jul 2016 17:41 |
| Last Modified: | 16 Aug 2023 16:28 |
| URI: | https://espace2.etsmtl.ca/id/eprint/13194 |
Actions (login required)
 |
View Item |