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A novel technique for die-level post-processing of released optical MEMS

Elsayed, Mohannad Y., Beaulieu, Philippe-Olivier, Briere, Jonathan, Menard, Michael et Nabki, Frederic. 2016. « A novel technique for die-level post-processing of released optical MEMS ». Journal of Micromechanics and Microengineering, vol. 26, nº 5.
Compte des citations dans Scopus : 1.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Nabki, Frédéric
Affiliation: Autres
Date Deposited: 13 Jul 2016 17:41
Last Modified: 13 Jul 2016 17:41
URI: https://espace2.etsmtl.ca/id/eprint/13194

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