Elsayed, Mohannad Y., Cicek, Paul-Vahe, Nabki, Frederic et El-Gamal, Mourad N..
2016.
« Bulk mode disk resonator with transverse piezoelectric actuation and electrostatic tuning ».
Journal of Microelectromechanical Systems, vol. 25, nº 2.
pp. 252-261.
Compte des citations dans Scopus : 29.
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Nabki F. 2016 13196 Bulk Mode Disk Resonator With.pdf - Version acceptée Licence d'utilisation : Tous les droits réservés aux détenteurs du droit d'auteur. Télécharger (2MB) | Prévisualisation |
Résumé
This paper presents a wine-glass bulk mode disk resonator based on a novel transverse piezoelectric actuation technique to achieve bulk mode resonance of the single crystalline silicon disk structure. The device is fabricated in a commercial microelectromechnical systems (MEMS) process, and combines reasonable quality factor and superior motional resistance in a low-cost technology. External capacitive electrodes are used for electrostatic tuning of the resonance frequency, relying on the electrostatic spring softening effect. The resonator was measured to have a resonance frequency of ~15 MHz and a quality factor of ~2000 in atmospheric pressure, increasing to ~5000 in 100-mtorr vacuum. The temperature co-efficient for the frequency of the device was also measured to be about -40 ppm/°C. The resonator requires no dc voltage for operation, but its resonance frequency can be tuned by varying the applied dc voltage on the capacitive electrodes with a factor of 1 ppb/V2.
| Type de document: | Article publié dans une revue, révisé par les pairs |
|---|---|
| Professeur: | Professeur Nabki, Frédéric |
| Affiliation: | Autres |
| Date de dépôt: | 13 juill. 2016 17:42 |
| Dernière modification: | 06 déc. 2016 20:20 |
| URI: | https://espace2.etsmtl.ca/id/eprint/13196 |
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