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Design of a low-cost MEMS monolithically-integrated relative humidity sensor

Cicek, Paul-Vahe, Saha, Tanmoy, Waguih, Bichoy, Nabki, Frederic et El-Gamal, Mourad N.. 2010. « Design of a low-cost MEMS monolithically-integrated relative humidity sensor ». In 2010 International Conference on Microelectronics (ICM'10) (Cairo, Egypt, Dec. 19-22, 2010), pp. 172-175. Institute of Electrical and Electronics Engineers Inc..
Compte des citations dans Scopus : 1.

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Item Type: Conference proceeding
Professor:
Professor
Nabki, Frédéric
Affiliation: Autres
Date Deposited: 13 Jul 2016 18:08
Last Modified: 13 Jul 2016 18:08
URI: https://espace2.etsmtl.ca/id/eprint/13213

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