Design of a low-cost MEMS monolithically-integrated relative humidity sensor

Cicek, Paul-Vahe, Saha, Tanmoy, Waguih, Bichoy, Nabki, Frederic and El-Gamal, Mourad N.. 2010. « Design of a low-cost MEMS monolithically-integrated relative humidity sensor ». In 2010 International Conference on Microelectronics (ICM'10) (Cairo, Egypt, Dec. 19-22, 2010) pp. 172-175. Institute of Electrical and Electronics Engineers Inc..
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Item Type:	Conference proceeding
Professor:	Professor Nabki, Frédéric
Affiliation:	Autres
Date Deposited:	13 Jul 2016 18:08
Last Modified:	13 Jul 2016 18:08
URI:	https://espace2.etsmtl.ca/id/eprint/13213

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