Low-temperature (<300°C) low-stress silicon carbide surface micromachining fabrication technology

Nabki, Frederic, Dusatko, Tomas A., Vengallatore, Srikar and El-Gamal, Mourad N.. 2008. « Low-temperature (<300°C) low-stress silicon carbide surface micromachining fabrication technology ». In Solid-state sensors, actuators, and microsystems workshop : technical digest (Hilton Head Island, SC, USA, June 1-5, 2008) pp. 216-219. San Diego, Calif. : Transducer Research Foundation.

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Item Type:	Conference proceeding
Editors:	Editors ORCID Turner, Kimberly L. UNSPECIFIED Spangler, Leland UNSPECIFIED
Professor:	Professor Nabki, Frédéric
Affiliation:	Autres
Date Deposited:	13 Jul 2016 18:04
Last Modified:	13 Jul 2016 18:04
URI:	https://espace2.etsmtl.ca/id/eprint/13234

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