Measurement and analysis of structural damping in silicon carbide microresonators

Prabhakar, Sairam, Nabki, Frederic, Mourad, El-Gamal and Vengallatore, Srikar. 2009. « Measurement and analysis of structural damping in silicon carbide microresonators ». In Microelectromechanical Systems - Materials and Devices II (Boston, MA, USA, Dec. 1-2, 2008) Coll. « MRS Proceedings », vol. 1139. pp. 47-52. Materials Research Society.
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Item Type:	Conference proceeding
ISBN:	02729172
Additional Information:	2008 MRS Fall Meeting
Professor:	Professor Nabki, Frédéric
Affiliation:	Autres
Date Deposited:	13 Jul 2016 18:05
Last Modified:	13 Jul 2016 18:05
URI:	https://espace2.etsmtl.ca/id/eprint/13238

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