A MEMS-based temperature-compensated vacuum sensor for low-power monolithic integration

Taghvaei, M. A., Cicek, Paul-Vahe, Allidina, Karim, Nabki, Frederic and El-Gamal, Mourad N.. 2010. « A MEMS-based temperature-compensated vacuum sensor for low-power monolithic integration ». In 2010 IEEE International Symposium on Circuits and Systems: Nano-Bio Circuit Fabrics and Systems (ISCAS) (Paris, France, May 30-June 2, 2010) pp. 3276-3279. IEEE Computer Society.
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Item Type:	Conference proceeding
Professor:	Professor Nabki, Frédéric
Affiliation:	Autres
Date Deposited:	13 Jul 2016 18:02
Last Modified:	13 Jul 2016 18:02
URI:	https://espace2.etsmtl.ca/id/eprint/13245

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