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Spark assisted chemical engraving (SACE) in microfactory

Wuthrich, R., Fujisaki, K., Couthy, P., Hof, L. A. et Bleuler, H.. 2005. « Spark assisted chemical engraving (SACE) in microfactory ». Journal of Micromechanics and Microengineering, vol. 15, nº 10. pp. 276-280.
Compte des citations dans Scopus : 22.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Hof, Lucas
Affiliation: Autres
Date Deposited: 25 Sep 2018 19:34
Last Modified: 25 Sep 2018 19:34
URI: https://espace2.etsmtl.ca/id/eprint/17335

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