Spark assisted chemical engraving (SACE) in microfactory

Wuthrich, R., Fujisaki, K., Couthy, P., Hof, L. A. and Bleuler, H.. 2005. « Spark assisted chemical engraving (SACE) in microfactory ». Journal of Micromechanics and Microengineering, vol. 15, nº 10. pp. 276-280.
Compte des citations dans Scopus : 40.

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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Hof, Lucas
Affiliation:	Autres
Date Deposited:	25 Sep 2018 19:34
Last Modified:	25 Sep 2018 19:34
URI:	https://espace2.etsmtl.ca/id/eprint/17335

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