Physical principles and miniaturization of Spark Assisted Chemical Engraving (SACE)

Wuthrich, R., Hof, L. A., Lal, A., Fujisaki, K., Bleuler, H., Mandin, P. and Picard, G.. 2005. « Physical principles and miniaturization of Spark Assisted Chemical Engraving (SACE) ». Journal of Micromechanics and Microengineering, vol. 15, nº 10. pp. 268-275.
Compte des citations dans Scopus : 114.

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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Hof, Lucas
Affiliation:	Autres
Date Deposited:	25 Sep 2018 19:34
Last Modified:	25 Sep 2018 19:34
URI:	https://espace2.etsmtl.ca/id/eprint/17337

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