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Physical principles and miniaturization of Spark Assisted Chemical Engraving (SACE)

Wuthrich, R., Hof, L. A., Lal, A., Fujisaki, K., Bleuler, H., Mandin, P. et Picard, G.. 2005. « Physical principles and miniaturization of Spark Assisted Chemical Engraving (SACE) ». Journal of Micromechanics and Microengineering, vol. 15, nº 10. pp. 268-275.
Compte des citations dans Scopus : 67.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Hof, Lucas
Affiliation: Autres
Date Deposited: 25 Sep 2018 19:34
Last Modified: 25 Sep 2018 19:34
URI: https://espace2.etsmtl.ca/id/eprint/17337

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