Wuthrich, R., Hof, L. A., Lal, A., Fujisaki, K., Bleuler, H., Mandin, P. et Picard, G..
2005.
« Physical principles and miniaturization of Spark Assisted Chemical Engraving (SACE) ».
Journal of Micromechanics and Microengineering, vol. 15, nº 10.
pp. 268-275.
Compte des citations dans Scopus : 67.
Rechercher dans Google Scholar
Official URL: http://dx.doi.org/10.1088/0960-1317/15/10/S03
Item Type: | Peer reviewed article published in a journal | ||
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Affiliation: | Autres | ||
Date Deposited: | 25 Sep 2018 19:34 | ||
Last Modified: | 25 Sep 2018 19:34 | ||
URI: | https://espace2.etsmtl.ca/id/eprint/17337 |
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