A novel topology for process variation-tolerant piezoelectric micromachined ultrasonic transducers

Robichaud, Alexandre, Deslandes, Dominic, Cicek, Paul-Vahe and Nabki, Frederic. 2018. « A novel topology for process variation-tolerant piezoelectric micromachined ultrasonic transducers ». Journal of Microelectromechanical Systems, vol. 27, nº 6. pp. 1204-1212.
Compte des citations dans Scopus : 13.

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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Deslandes, Dominic Nabki, Frédéric
Affiliation:	Génie électrique, Génie électrique
Date Deposited:	19 Nov 2018 20:28
Last Modified:	22 Jan 2020 20:10
URI:	https://espace2.etsmtl.ca/id/eprint/17574

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