Alfaifi, Ahmad, Alhomoudi, Ibrahim A., Nabki, Frederic et El-Gamal, Mourad N..
2018.
« In-plane high-sensitivity capacitive accelerometer in a 3-D CMOS-compatible surface micromachining process ».
Journal of Microelectromechanical Systems.
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Official URL: http://dx.doi.org/10.1109/JMEMS.2018.2877736
Item Type: | Peer reviewed article published in a journal | ||
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Affiliation: | Génie électrique | ||
Date Deposited: | 04 Dec 2018 20:23 | ||
Last Modified: | 22 Jan 2020 20:10 | ||
URI: | https://espace2.etsmtl.ca/id/eprint/17686 |
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