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In-plane high-sensitivity capacitive accelerometer in a 3-D CMOS-compatible surface micromachining process

Alfaifi, Ahmad, Alhomoudi, Ibrahim A., Nabki, Frederic et El-Gamal, Mourad N.. 2019. « In-plane high-sensitivity capacitive accelerometer in a 3-D CMOS-compatible surface micromachining process ». Journal of Microelectromechanical Systems, vol. 28, nº 1. pp. 14-24.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Nabki, Frédéric
Affiliation: Génie électrique
Date Deposited: 04 Dec 2018 20:23
Last Modified: 19 Oct 2021 20:15
URI: https://espace2.etsmtl.ca/id/eprint/17686

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