Alfaifi, Ahmad, Alhomoudi, Ibrahim A., Nabki, Frederic and El-Gamal, Mourad N..
2019.
« In-plane high-sensitivity capacitive accelerometer in a 3-D CMOS-compatible surface micromachining process ».
Journal of Microelectromechanical Systems, vol. 28, nº 1.
pp. 14-24.
Compte des citations dans Scopus : 6.
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Official URL: http://dx.doi.org/10.1109/JMEMS.2018.2877736
Item Type: | Peer reviewed article published in a journal |
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Professor: | Professor Nabki, Frédéric |
Affiliation: | Génie électrique |
Date Deposited: | 04 Dec 2018 20:23 |
Last Modified: | 19 Oct 2021 20:15 |
URI: | https://espace2.etsmtl.ca/id/eprint/17686 |
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