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Bulk mode microelectromechanical resonator devices and methods

Elsayed, Mohannad, El-Gamal, Mourad, Nabki, Frederic et Cicek, Paul-Vahe (inventeurs) 11 August 2020. « Bulk mode microelectromechanical resonator devices and methods ». MEMS Vision International Inc. (titulaire(s)). Brevet américain US 10,742,191.

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Item Type: Patents (Brevet américain)
Professor:
Professor
Nabki, Frédéric
Affiliation: Génie électrique
Date Deposited: 11 Jun 2021 18:24
Last Modified: 11 Jun 2021 18:24
URI: https://espace2.etsmtl.ca/id/eprint/22829

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