Surface micromachined out-of-plane electrostatic MEMS actuator integrated with displacement sensor

Nabavi, Seyedfakhreddin, Menard, Michael and Nabki, Frederic. 2021. « Surface micromachined out-of-plane electrostatic MEMS actuator integrated with displacement sensor ». In IEEE Sensors (Sydney, Australia, Oct. 31-Nov. 03, 2021) Institute of Electrical and Electronics Engineers Inc..
Compte des citations dans Scopus : 4.

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Item Type:	Conference proceeding
ISBN:	19300395
Professor:	Professor Ménard, Michaël Nabki, Frédéric
Affiliation:	Génie électrique, Génie électrique
Date Deposited:	25 Feb 2022 21:22
Last Modified:	25 Feb 2022 21:22
URI:	https://espace2.etsmtl.ca/id/eprint/24034

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