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Surface micromachined out-of-plane electrostatic MEMS actuator integrated with displacement sensor

Nabavi, Seyedfakhreddin, Menard, Michael et Nabki, Frederic. 2021. « Surface micromachined out-of-plane electrostatic MEMS actuator integrated with displacement sensor ». In IEEE Sensors (Sydney, Australia, Oct. 31-Nov. 03, 2021) Institute of Electrical and Electronics Engineers Inc..

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Item Type: Conference proceeding
ISBN: 19300395
Professor:
Professor
Ménard, Michaël
Nabki, Frédéric
Affiliation: Génie électrique, Génie électrique
Date Deposited: 25 Feb 2022 21:22
Last Modified: 25 Feb 2022 21:22
URI: https://espace2.etsmtl.ca/id/eprint/24034

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