Nabavi, Seyedfakhreddin, Ménard, Michaël and Nabki, Frederic.
2022.
« A SOI out-of-plane electrostatic MEMS actuator based on in-plane motion ».
Journal of Microelectromechanical Systems, vol. 31, nº 5.
pp. 820-829.
Compte des citations dans Scopus : 10.
Rechercher dans Google Scholar
Official URL: https://doi.org/10.1109/JMEMS.2022.3190829
| Item Type: | Peer reviewed article published in a journal |
|---|---|
| Professor: | Professor Ménard, Michaël Nabki, Frédéric |
| Affiliation: | Génie électrique, Génie électrique |
| Date Deposited: | 24 Aug 2022 18:33 |
| Last Modified: | 26 Jan 2023 20:57 |
| URI: | https://espace2.etsmtl.ca/id/eprint/25113 |
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