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A SOI out-of-plane electrostatic MEMS actuator based on in-plane motion

Nabavi, Seyedfakhreddin, Ménard, Michaël et Nabki, Frederic. 2022. « A SOI out-of-plane electrostatic MEMS actuator based on in-plane motion ». Journal of Microelectromechanical Systems, vol. 31, nº 5. pp. 820-829.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Ménard, Michaël
Nabki, Frédéric
Affiliation: Génie électrique, Génie électrique
Date Deposited: 24 Aug 2022 18:33
Last Modified: 26 Jan 2023 20:57
URI: https://espace2.etsmtl.ca/id/eprint/25113

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